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- W2358822946 abstract "Si films used for TFT are mostly prepared by PECVD method in AMFPD. But this method is not perfect because the plasma in PECVD will harm Si films and deteriorate its characteristic. A new technology for preparing films has appeared,that's Cat-CVD. Comparing with PECVD, Cat-CVD (Catalytic Chemical Vapor Deposition) has many merits for the films deposited: higher rate of deposition; greater efficiency of row material gas; much lower temperature of substrate; larger density and exce- llent electronic characteristics,etc. It is a new technology that could been widely used in preparation of Si films for TFT of AMLCD and it can also be used to improve characteristics of films, such as passivation or etching of films. This paper summarized the mechanism of Cat-CVD and its applications in TFT, discussed its scarcity and the direction in further research work." @default.
- W2358822946 created "2016-06-24" @default.
- W2358822946 creator A5042927098 @default.
- W2358822946 date "2006-01-01" @default.
- W2358822946 modified "2023-09-25" @default.
- W2358822946 title "Preparation of Si Film by Cat-CVD and Its Applications in TFT" @default.
- W2358822946 hasPublicationYear "2006" @default.
- W2358822946 type Work @default.
- W2358822946 sameAs 2358822946 @default.
- W2358822946 citedByCount "0" @default.
- W2358822946 crossrefType "journal-article" @default.
- W2358822946 hasAuthorship W2358822946A5042927098 @default.
- W2358822946 hasConcept C100460472 @default.
- W2358822946 hasConcept C111368507 @default.
- W2358822946 hasConcept C127313418 @default.
- W2358822946 hasConcept C151730666 @default.
- W2358822946 hasConcept C171250308 @default.
- W2358822946 hasConcept C19067145 @default.
- W2358822946 hasConcept C192562407 @default.
- W2358822946 hasConcept C2777289219 @default.
- W2358822946 hasConcept C2779227376 @default.
- W2358822946 hasConcept C2816523 @default.
- W2358822946 hasConcept C33574316 @default.
- W2358822946 hasConcept C38347018 @default.
- W2358822946 hasConcept C49040817 @default.
- W2358822946 hasConcept C57410435 @default.
- W2358822946 hasConcept C64297162 @default.
- W2358822946 hasConcept C86803240 @default.
- W2358822946 hasConcept C87359718 @default.
- W2358822946 hasConceptScore W2358822946C100460472 @default.
- W2358822946 hasConceptScore W2358822946C111368507 @default.
- W2358822946 hasConceptScore W2358822946C127313418 @default.
- W2358822946 hasConceptScore W2358822946C151730666 @default.
- W2358822946 hasConceptScore W2358822946C171250308 @default.
- W2358822946 hasConceptScore W2358822946C19067145 @default.
- W2358822946 hasConceptScore W2358822946C192562407 @default.
- W2358822946 hasConceptScore W2358822946C2777289219 @default.
- W2358822946 hasConceptScore W2358822946C2779227376 @default.
- W2358822946 hasConceptScore W2358822946C2816523 @default.
- W2358822946 hasConceptScore W2358822946C33574316 @default.
- W2358822946 hasConceptScore W2358822946C38347018 @default.
- W2358822946 hasConceptScore W2358822946C49040817 @default.
- W2358822946 hasConceptScore W2358822946C57410435 @default.
- W2358822946 hasConceptScore W2358822946C64297162 @default.
- W2358822946 hasConceptScore W2358822946C86803240 @default.
- W2358822946 hasConceptScore W2358822946C87359718 @default.
- W2358822946 hasLocation W23588229461 @default.
- W2358822946 hasOpenAccess W2358822946 @default.
- W2358822946 hasPrimaryLocation W23588229461 @default.
- W2358822946 hasRelatedWork W1983513864 @default.
- W2358822946 hasRelatedWork W1996156101 @default.
- W2358822946 hasRelatedWork W1997300699 @default.
- W2358822946 hasRelatedWork W2002498889 @default.
- W2358822946 hasRelatedWork W2024608595 @default.
- W2358822946 hasRelatedWork W2042977670 @default.
- W2358822946 hasRelatedWork W2051428202 @default.
- W2358822946 hasRelatedWork W2076808510 @default.
- W2358822946 hasRelatedWork W2077729715 @default.
- W2358822946 hasRelatedWork W2079723551 @default.
- W2358822946 hasRelatedWork W2090022466 @default.
- W2358822946 hasRelatedWork W2152400620 @default.
- W2358822946 hasRelatedWork W2214132370 @default.
- W2358822946 hasRelatedWork W2271007490 @default.
- W2358822946 hasRelatedWork W2325771690 @default.
- W2358822946 hasRelatedWork W2367722725 @default.
- W2358822946 hasRelatedWork W2464760298 @default.
- W2358822946 hasRelatedWork W2464406407 @default.
- W2358822946 hasRelatedWork W2590454124 @default.
- W2358822946 hasRelatedWork W3074788744 @default.
- W2358822946 isParatext "false" @default.
- W2358822946 isRetracted "false" @default.
- W2358822946 magId "2358822946" @default.
- W2358822946 workType "article" @default.