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- W2358910245 abstract "With smart phones and handheld computers,such as ultra-thin,ultra-fine electronic products are in huge numbers and widely accepted by the users world widely,the miniaturization of electronic products and high-density have become a necessity.The emergence of these new electronic products drives PCB,HDI and IC substrates to an ultra-precise direction.According Prismark forecasts to 2014,the line width and space(L/S) precision will be less than 10 mm/10 mm.This makes existing DMD direct imaging and other LDI equipment face high difficulty to meet the high-precision accuracy,speed and other performance requirements.This paper describes a new type of LDI system applied for the line width L/S less than 10 mm/10 mm precision,high-speed mass production application,so called multi-optical-engine laser dynamic imaging(MLDI) technology.This technology is based on space light modulator(DMD,digital micro-mirror array devices) for modulating laser image dynamically,where micro-lens arrays are integrated inside the optical engines to narrow the exposure spots(i.e.,narrower line width of the pattern) while keeping the larger scanning area covered by whole DMD devices.The optical engine uses our proprietary,patent pending structures(i.e.,DMD following by pairs of micro-lens layers and combining with a telecentric beam path,spatial filtering functions),so the DOF(depth of focus) of the image exposing extends to several hundred microns,even over several millimeters,which can improve the practicality and stability of the system significantly.DMD multi-beam tilt scanning technology is also used to achieve a more sophisticated and high-density exposure graphics.Multiple optical engines are used to realize simultaneously exposure over large area,which,in total,ends up the new generation of high-precision mass production LDI equipments." @default.
- W2358910245 created "2016-06-24" @default.
- W2358910245 creator A5064933303 @default.
- W2358910245 date "2012-01-01" @default.
- W2358910245 modified "2023-09-24" @default.
- W2358910245 title "Multi-optical-engine laser dynamic imaging technology and its application in PCB,HDI and IC subtract fabrications" @default.
- W2358910245 hasPublicationYear "2012" @default.
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