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- W2359194216 abstract "The up-to-date results of MOCVD reactor numerical simulation are introduced, and the structure parameters of reactor are optimum designed according to the results and applied to the MOCVD systems, which are developed for GaN and/or quaternary compound materials by the 48th institute of CETC." @default.
- W2359194216 created "2016-06-24" @default.
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- W2359194216 date "2008-01-01" @default.
- W2359194216 modified "2023-09-24" @default.
- W2359194216 title "Numerical-simulation-based Design and Verification of MOCVD Reactor" @default.
- W2359194216 hasPublicationYear "2008" @default.
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