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- W2359260447 abstract "The measurement principle of model IL 100 thickness and rate monitor aredescribed. The method of converting linear thickness in nm units into mass thick-ness in μg/cm~2 units is mentioned. The effect of crucible temperature upon thick-ness determination is discussed. The gas amount absorbed by deposition foils isgiven." @default.
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- W2359260447 date "1990-01-01" @default.
- W2359260447 modified "2023-10-01" @default.
- W2359260447 title "DETERMINATION AND CONTROL OF TARGET THICKNESSES WITH QUARTZ CRYSTAL THICKNESS MONITOR" @default.
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