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- W2359280880 abstract "Silicon carbide(SiC),owing to its excellent electrical,mechanical and chemical properties,is a promising material for the development of high-temperature pressure sensors.This paper is a review of high-temperature SiC pressure sensor.The SiC material property is introduced.The latest development of the high-temperature SiC pressure sensors is discussed. The structures and characteristics of capacitive,piezoresistive,and optical pressure sensors are presented and compared. Finally,the present problems and challenge for these sensors in China is analyzed." @default.
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- W2359280880 date "2011-01-01" @default.
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- W2359280880 title "Recent Development and Future Perspective of Silicon Carbide High-Temperature Pressure Sensor" @default.
- W2359280880 hasPublicationYear "2011" @default.
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