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- W2359284856 abstract "Cr and Ni Cr (Ni: 80%, Cr: 20%) thin film are fabricated by RF sputtering. The impacts of the temperature and the time of heat treatment on the temperature coefficient of resistance (TCR) of Cr thin film are discussed respectively. The 100℃ temperature could be gained by using Ni Cr and Cr micro heater when the DC voltages are supplied to the heater and the rise rates over 0 5℃/s. By measuring the resistance temperature curve of micro heater, the results show that the micro heater fabricated has high reliability and repeatability and they are suitable for the use of PCR biochip and thermal distribution micro-fluidic sensor based on silicon." @default.
- W2359284856 created "2016-06-24" @default.
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- W2359284856 date "2004-01-01" @default.
- W2359284856 modified "2023-09-25" @default.
- W2359284856 title "Research of Metal Membrane Heater" @default.
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