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- W2359328141 abstract "Modern MOCVD technology and its development abstract metalorgainc chemical vepor deposition (MOCVD) has been a key technology in manufacturing compound semiconductor devices. In this paper, the recent development of modern MOCVD equipment with sophisticated process control, reliable and readily available on industrial scale, together with its characteristics and the related principles underneath are described. The vertical high speed disk reactor technology meeting the requirements of both a uniform reactant flow over substrate and a uniform substrate temperature is specially focused. The development of MOCVD and its application in the future are also discussed." @default.
- W2359328141 created "2016-06-24" @default.
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- W2359328141 date "1999-01-01" @default.
- W2359328141 modified "2023-09-23" @default.
- W2359328141 title "RECENT PROGRESS IN MOCVD TECHNOLOGY" @default.
- W2359328141 hasPublicationYear "1999" @default.
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