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- W2359681423 abstract "Highly transparent and conductive zirconium-doped zinc oxide (ZnO:Zr) thin films were deposited on quartz substrates by DC magnetron sputtering method.The effect of substrate temperature on the structural,morphology,electrical and optical properties of ZnO:Zr films were investigated in detail.The XRD results show that the deposited films are polycrystalline with a hexagonal structure and a preferred orientation along the c-axis.The crystallinity and conductivity of the deposited films are found to largely depend on substrate temperature.At the optimum substrate temperature of 300 ℃,the deposited films have the lowest resistivity of 7.58×10-4 Ω·cm and a high transmittance of above 91% in the visible range." @default.
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- W2359681423 date "2010-01-01" @default.
- W2359681423 modified "2023-09-23" @default.
- W2359681423 title "Effect of Substrate Temperature on Properties of ZnO: Zr Transparent Conductive Thin Films Deposited by DC Magnetron Sputtering" @default.
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