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- W2359850638 abstract "TiNx/Ag/TiNx low-e films are deposited on glass slides by magnetron sputtering.The influence of deposition parameters on the optical property and the corrosion resistance property of the low-e films are investigated.The experiment results indicate that when the thickness of the surface TiNx film,which is a good protective film from damage of corrosion,is 32nm,the inner film is 16nm(the N2 mass flow rate is 55sccm),and the Ag film is also 16nm,the low-e film presents a very good corrosion-resistance and optical property." @default.
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- W2359850638 date "2010-01-01" @default.
- W2359850638 modified "2023-09-24" @default.
- W2359850638 title "Effect of Preparing Parameters on Properties of TiN_x/Ag/TiN_x Low-emissivity Film" @default.
- W2359850638 hasPublicationYear "2010" @default.
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