Matches in SemOpenAlex for { <https://semopenalex.org/work/W2360024461> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2360024461 abstract "After improving the Stoney's formula widely used in the curvature method,a theoretical model for SU-8 internal stress calculation is proposed and a profile method is used to measure the curvature radius of substrate. The influence of substrate diameter,film thickness and Post-exposure Bake(PEB) temperature on substrate curvature is investigated by an in-depth ANSYS analysis.Analytical results show that the PEB temperature is the main factor in effecting on internal stress.In addition,internal stresses of SU-8 under three different PEB temperatures(55 ℃、70 ℃ and 85 ℃) are measured,the results show that a low PEB temperature can reduce the internal stresses effectively.The experimental results have good agreement with simulation analytical results,which provides a support for the quantitative analysis of the internal stress in SU-8 layers." @default.
- W2360024461 created "2016-06-24" @default.
- W2360024461 creator A5079356692 @default.
- W2360024461 date "2007-01-01" @default.
- W2360024461 modified "2023-09-24" @default.
- W2360024461 title "Study on internal stress of thick SU-8 layer in MEMS" @default.
- W2360024461 hasPublicationYear "2007" @default.
- W2360024461 type Work @default.
- W2360024461 sameAs 2360024461 @default.
- W2360024461 citedByCount "0" @default.
- W2360024461 crossrefType "journal-article" @default.
- W2360024461 hasAuthorship W2360024461A5079356692 @default.
- W2360024461 hasConcept C111368507 @default.
- W2360024461 hasConcept C11665553 @default.
- W2360024461 hasConcept C120665830 @default.
- W2360024461 hasConcept C121332964 @default.
- W2360024461 hasConcept C127313418 @default.
- W2360024461 hasConcept C127813850 @default.
- W2360024461 hasConcept C138885662 @default.
- W2360024461 hasConcept C159985019 @default.
- W2360024461 hasConcept C175017881 @default.
- W2360024461 hasConcept C178635117 @default.
- W2360024461 hasConcept C192562407 @default.
- W2360024461 hasConcept C195065555 @default.
- W2360024461 hasConcept C21036866 @default.
- W2360024461 hasConcept C2524010 @default.
- W2360024461 hasConcept C2777289219 @default.
- W2360024461 hasConcept C2779227376 @default.
- W2360024461 hasConcept C2780009758 @default.
- W2360024461 hasConcept C2988361403 @default.
- W2360024461 hasConcept C33923547 @default.
- W2360024461 hasConcept C37977207 @default.
- W2360024461 hasConcept C38652104 @default.
- W2360024461 hasConcept C41008148 @default.
- W2360024461 hasConcept C41895202 @default.
- W2360024461 hasConcept C49040817 @default.
- W2360024461 hasConcept C77088390 @default.
- W2360024461 hasConceptScore W2360024461C111368507 @default.
- W2360024461 hasConceptScore W2360024461C11665553 @default.
- W2360024461 hasConceptScore W2360024461C120665830 @default.
- W2360024461 hasConceptScore W2360024461C121332964 @default.
- W2360024461 hasConceptScore W2360024461C127313418 @default.
- W2360024461 hasConceptScore W2360024461C127813850 @default.
- W2360024461 hasConceptScore W2360024461C138885662 @default.
- W2360024461 hasConceptScore W2360024461C159985019 @default.
- W2360024461 hasConceptScore W2360024461C175017881 @default.
- W2360024461 hasConceptScore W2360024461C178635117 @default.
- W2360024461 hasConceptScore W2360024461C192562407 @default.
- W2360024461 hasConceptScore W2360024461C195065555 @default.
- W2360024461 hasConceptScore W2360024461C21036866 @default.
- W2360024461 hasConceptScore W2360024461C2524010 @default.
- W2360024461 hasConceptScore W2360024461C2777289219 @default.
- W2360024461 hasConceptScore W2360024461C2779227376 @default.
- W2360024461 hasConceptScore W2360024461C2780009758 @default.
- W2360024461 hasConceptScore W2360024461C2988361403 @default.
- W2360024461 hasConceptScore W2360024461C33923547 @default.
- W2360024461 hasConceptScore W2360024461C37977207 @default.
- W2360024461 hasConceptScore W2360024461C38652104 @default.
- W2360024461 hasConceptScore W2360024461C41008148 @default.
- W2360024461 hasConceptScore W2360024461C41895202 @default.
- W2360024461 hasConceptScore W2360024461C49040817 @default.
- W2360024461 hasConceptScore W2360024461C77088390 @default.
- W2360024461 hasLocation W23600244611 @default.
- W2360024461 hasOpenAccess W2360024461 @default.
- W2360024461 hasPrimaryLocation W23600244611 @default.
- W2360024461 hasRelatedWork W118471060 @default.
- W2360024461 hasRelatedWork W1595040274 @default.
- W2360024461 hasRelatedWork W1865387854 @default.
- W2360024461 hasRelatedWork W1964174210 @default.
- W2360024461 hasRelatedWork W1986602792 @default.
- W2360024461 hasRelatedWork W198977807 @default.
- W2360024461 hasRelatedWork W1992008359 @default.
- W2360024461 hasRelatedWork W2020784045 @default.
- W2360024461 hasRelatedWork W2029061333 @default.
- W2360024461 hasRelatedWork W2034624270 @default.
- W2360024461 hasRelatedWork W2078698632 @default.
- W2360024461 hasRelatedWork W2081029742 @default.
- W2360024461 hasRelatedWork W2111661592 @default.
- W2360024461 hasRelatedWork W2115175125 @default.
- W2360024461 hasRelatedWork W2315732804 @default.
- W2360024461 hasRelatedWork W2358104297 @default.
- W2360024461 hasRelatedWork W2358208538 @default.
- W2360024461 hasRelatedWork W2374539529 @default.
- W2360024461 hasRelatedWork W2408646116 @default.
- W2360024461 hasRelatedWork W954493639 @default.
- W2360024461 isParatext "false" @default.
- W2360024461 isRetracted "false" @default.
- W2360024461 magId "2360024461" @default.
- W2360024461 workType "article" @default.