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- W2360528024 abstract "It is well known that optical limitation is t he bottle neck in traditional lithography process. A new process, imprint lithogra phy, is presented in this paper, and in this process the mold is part of the key techniques. Based on the research as follows: the amount of curing agent, th e solidifying temperature and time, and the analysis of flatness, uniformity, fe ature sizes and shrinkage ratio of resist on mold, the perfect stamp and optimal manufacturing process is achieved." @default.
- W2360528024 created "2016-06-24" @default.
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- W2360528024 date "2003-01-01" @default.
- W2360528024 modified "2023-09-27" @default.
- W2360528024 title "A Method for Improving the Precision of Soft-Mold Manufacturing for Imprint Lit hography" @default.
- W2360528024 hasPublicationYear "2003" @default.
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