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- W2360606927 abstract "Magnetic-field-aided PECVD(Plasma Enhanced Chemical Vapor Deposition) system was designed according to the magnetic field distribution in solenoid and the effect of magnetic field on the electrons in plasma.Investigates the way to obtain homogeneous magnetic field in the system.With SiH4 and N2 used as gas reactants the SiN thin film is deposited under low pressure.The deposition rate and refractive index are measured and the Atomic Force Microscope(AFM) images of film surface morphology are obtained,and the homogeneity of magnetic field distribution is thus verified.Finally,the role of magnetic field played in the PECVD system is analyzed." @default.
- W2360606927 created "2016-06-24" @default.
- W2360606927 creator A5002180008 @default.
- W2360606927 date "2007-01-01" @default.
- W2360606927 modified "2023-09-26" @default.
- W2360606927 title "Magnetic-field-aided plasma enhanced chemical vapor deposition" @default.
- W2360606927 hasPublicationYear "2007" @default.
- W2360606927 type Work @default.
- W2360606927 sameAs 2360606927 @default.
- W2360606927 citedByCount "0" @default.
- W2360606927 crossrefType "journal-article" @default.
- W2360606927 hasAuthorship W2360606927A5002180008 @default.
- W2360606927 hasConcept C105795698 @default.
- W2360606927 hasConcept C113196181 @default.
- W2360606927 hasConcept C115260700 @default.
- W2360606927 hasConcept C121332964 @default.
- W2360606927 hasConcept C142259097 @default.
- W2360606927 hasConcept C145738678 @default.
- W2360606927 hasConcept C171250308 @default.
- W2360606927 hasConcept C185592680 @default.
- W2360606927 hasConcept C19067145 @default.
- W2360606927 hasConcept C192562407 @default.
- W2360606927 hasConcept C32546565 @default.
- W2360606927 hasConcept C33643480 @default.
- W2360606927 hasConcept C33923547 @default.
- W2360606927 hasConcept C38347018 @default.
- W2360606927 hasConcept C43617362 @default.
- W2360606927 hasConcept C57410435 @default.
- W2360606927 hasConcept C62520636 @default.
- W2360606927 hasConcept C82706917 @default.
- W2360606927 hasConceptScore W2360606927C105795698 @default.
- W2360606927 hasConceptScore W2360606927C113196181 @default.
- W2360606927 hasConceptScore W2360606927C115260700 @default.
- W2360606927 hasConceptScore W2360606927C121332964 @default.
- W2360606927 hasConceptScore W2360606927C142259097 @default.
- W2360606927 hasConceptScore W2360606927C145738678 @default.
- W2360606927 hasConceptScore W2360606927C171250308 @default.
- W2360606927 hasConceptScore W2360606927C185592680 @default.
- W2360606927 hasConceptScore W2360606927C19067145 @default.
- W2360606927 hasConceptScore W2360606927C192562407 @default.
- W2360606927 hasConceptScore W2360606927C32546565 @default.
- W2360606927 hasConceptScore W2360606927C33643480 @default.
- W2360606927 hasConceptScore W2360606927C33923547 @default.
- W2360606927 hasConceptScore W2360606927C38347018 @default.
- W2360606927 hasConceptScore W2360606927C43617362 @default.
- W2360606927 hasConceptScore W2360606927C57410435 @default.
- W2360606927 hasConceptScore W2360606927C62520636 @default.
- W2360606927 hasConceptScore W2360606927C82706917 @default.
- W2360606927 hasLocation W23606069271 @default.
- W2360606927 hasOpenAccess W2360606927 @default.
- W2360606927 hasPrimaryLocation W23606069271 @default.
- W2360606927 hasRelatedWork W1500794348 @default.
- W2360606927 hasRelatedWork W1966512978 @default.
- W2360606927 hasRelatedWork W1970857294 @default.
- W2360606927 hasRelatedWork W1987789688 @default.
- W2360606927 hasRelatedWork W2004817089 @default.
- W2360606927 hasRelatedWork W2005069452 @default.
- W2360606927 hasRelatedWork W2011129990 @default.
- W2360606927 hasRelatedWork W2014841449 @default.
- W2360606927 hasRelatedWork W2015351592 @default.
- W2360606927 hasRelatedWork W2015875240 @default.
- W2360606927 hasRelatedWork W2027019558 @default.
- W2360606927 hasRelatedWork W2034274261 @default.
- W2360606927 hasRelatedWork W2037443737 @default.
- W2360606927 hasRelatedWork W2043994319 @default.
- W2360606927 hasRelatedWork W2049448944 @default.
- W2360606927 hasRelatedWork W2061166343 @default.
- W2360606927 hasRelatedWork W2085388526 @default.
- W2360606927 hasRelatedWork W2537577715 @default.
- W2360606927 hasRelatedWork W2765384165 @default.
- W2360606927 hasRelatedWork W2792362049 @default.
- W2360606927 isParatext "false" @default.
- W2360606927 isRetracted "false" @default.
- W2360606927 magId "2360606927" @default.
- W2360606927 workType "article" @default.