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- W2360802727 abstract "NiP substrate of computer hard drive was chemical mechanical Polished by alkali Nanometer SiO2 Slurry.Compared with acid slurry,the Smoothness,the uniformity and the roughness of the NiP treated substrate were improved." @default.
- W2360802727 created "2016-06-24" @default.
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- W2360802727 date "2009-01-01" @default.
- W2360802727 modified "2023-09-26" @default.
- W2360802727 title "CMP Study of NiP Substrate of Computer Hard-disk with Alkali Nanometer SiO_2 Slurry" @default.
- W2360802727 hasPublicationYear "2009" @default.
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