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- W2360910145 abstract "ZrO_2films were deposited with rf sputteringX-ray diffraction method was used for analyzing the stress in the films,which could explain why the films peel off.A strategy for avoiding peeling was proposed." @default.
- W2360910145 created "2016-06-24" @default.
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- W2360910145 date "2000-01-01" @default.
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- W2360910145 title "STRESS IN ZrO_2 FILMS" @default.
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