FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2360954857> ?p ?o ?g. }

• W2360954857 abstract "Phosphorus doped nanocrystalline silicon (nc-Si) that deposited on a p-type silicon substrate was prepared by standard radio-frequency plasma enhanced chemical vapor deposition (RF-PECVD). The optical emission spectroscopy (OES) is used as a diagnostic tool for analyzing the processing species and intensity in plasma. The obtained SiH∗ spectra are recorded to explain results from the deposition rate of nanocrystalline silicon. The deposition rate increases with increasing power when the electrode distance, working pressure and total flow rate are fixed. Moreover, we also describe ratios of Hα∗ / SiH∗ and Si∗ / SiH∗ to represent the crystallization rate index and electron temperature respectively. Based on OES results, we can utilize plasma spectra as database to monitor film properties. The spectroscopic ellipsometer (SE) and hall measurements were used to further study the growth rate, crystallinity, and electrical property of the films. Under the process conditions of 225°C substrate temperature, 11mW/cm2 power density, 300mTorr working pressure and 30mm electrode distance, the best optimized n-type nc-Si films on a 4cm2 bifacial p-type Cz silicon wafer were obtained." @default.
• W2360954857 created "2016-06-24" @default.
• W2360954857 creator A5005658999 @default.
• W2360954857 creator A5019371364 @default.
• W2360954857 creator A5029063079 @default.
• W2360954857 creator A5030099214 @default.
• W2360954857 creator A5030253390 @default.
• W2360954857 creator A5033486841 @default.
• W2360954857 creator A5038193371 @default.
• W2360954857 date "2016-03-01" @default.
• W2360954857 modified "2023-09-25" @default.
• W2360954857 title "The plasma diagnosis by optical emission spectroscopy for the study of phosphorus doped nanocrystalline silicone film growth" @default.
• W2360954857 cites W1981247648 @default.
• W2360954857 cites W1984721616 @default.
• W2360954857 cites W1996797340 @default.
• W2360954857 cites W1999878168 @default.
• W2360954857 cites W2006162603 @default.
• W2360954857 cites W2031675731 @default.
• W2360954857 cites W2032445878 @default.
• W2360954857 cites W2048997151 @default.
• W2360954857 cites W2066422402 @default.
• W2360954857 cites W2092324798 @default.
• W2360954857 cites W2126808884 @default.
• W2360954857 cites W2169429960 @default.
• W2360954857 cites W2953250460 @default.
• W2360954857 doi "https://doi.org/10.1109/cstic.2016.7463930" @default.
• W2360954857 hasPublicationYear "2016" @default.
• W2360954857 type Work @default.
• W2360954857 sameAs 2360954857 @default.
• W2360954857 citedByCount "0" @default.
• W2360954857 crossrefType "proceedings-article" @default.
• W2360954857 hasAuthorship W2360954857A5005658999 @default.
• W2360954857 hasAuthorship W2360954857A5019371364 @default.
• W2360954857 hasAuthorship W2360954857A5029063079 @default.
• W2360954857 hasAuthorship W2360954857A5030099214 @default.
• W2360954857 hasAuthorship W2360954857A5030253390 @default.
• W2360954857 hasAuthorship W2360954857A5033486841 @default.
• W2360954857 hasAuthorship W2360954857A5038193371 @default.
• W2360954857 hasConcept C111368507 @default.
• W2360954857 hasConcept C113196181 @default.
• W2360954857 hasConcept C127313418 @default.
• W2360954857 hasConcept C140676511 @default.
• W2360954857 hasConcept C159985019 @default.
• W2360954857 hasConcept C160671074 @default.
• W2360954857 hasConcept C171250308 @default.
• W2360954857 hasConcept C18293161 @default.
• W2360954857 hasConcept C185592680 @default.
• W2360954857 hasConcept C19067145 @default.
• W2360954857 hasConcept C192562407 @default.
• W2360954857 hasConcept C2776390347 @default.
• W2360954857 hasConcept C2777289219 @default.
• W2360954857 hasConcept C2779667780 @default.
• W2360954857 hasConcept C38347018 @default.
• W2360954857 hasConcept C43617362 @default.
• W2360954857 hasConcept C46275449 @default.
• W2360954857 hasConcept C49040817 @default.
• W2360954857 hasConcept C544956773 @default.
• W2360954857 hasConcept C57410435 @default.
• W2360954857 hasConcept C80086925 @default.
• W2360954857 hasConceptScore W2360954857C111368507 @default.
• W2360954857 hasConceptScore W2360954857C113196181 @default.
• W2360954857 hasConceptScore W2360954857C127313418 @default.
• W2360954857 hasConceptScore W2360954857C140676511 @default.
• W2360954857 hasConceptScore W2360954857C159985019 @default.
• W2360954857 hasConceptScore W2360954857C160671074 @default.
• W2360954857 hasConceptScore W2360954857C171250308 @default.
• W2360954857 hasConceptScore W2360954857C18293161 @default.
• W2360954857 hasConceptScore W2360954857C185592680 @default.
• W2360954857 hasConceptScore W2360954857C19067145 @default.
• W2360954857 hasConceptScore W2360954857C192562407 @default.
• W2360954857 hasConceptScore W2360954857C2776390347 @default.
• W2360954857 hasConceptScore W2360954857C2777289219 @default.
• W2360954857 hasConceptScore W2360954857C2779667780 @default.
• W2360954857 hasConceptScore W2360954857C38347018 @default.
• W2360954857 hasConceptScore W2360954857C43617362 @default.
• W2360954857 hasConceptScore W2360954857C46275449 @default.
• W2360954857 hasConceptScore W2360954857C49040817 @default.
• W2360954857 hasConceptScore W2360954857C544956773 @default.
• W2360954857 hasConceptScore W2360954857C57410435 @default.
• W2360954857 hasConceptScore W2360954857C80086925 @default.
• W2360954857 hasLocation W23609548571 @default.
• W2360954857 hasOpenAccess W2360954857 @default.
• W2360954857 hasPrimaryLocation W23609548571 @default.
• W2360954857 hasRelatedWork W1970857294 @default.
• W2360954857 hasRelatedWork W1976397635 @default.
• W2360954857 hasRelatedWork W1980649127 @default.
• W2360954857 hasRelatedWork W2005069452 @default.
• W2360954857 hasRelatedWork W2011129990 @default.
• W2360954857 hasRelatedWork W2014437747 @default.
• W2360954857 hasRelatedWork W2027019558 @default.
• W2360954857 hasRelatedWork W2029081231 @default.
• W2360954857 hasRelatedWork W2046881866 @default.
• W2360954857 hasRelatedWork W2047812592 @default.
• W2360954857 hasRelatedWork W2054666090 @default.
• W2360954857 hasRelatedWork W2055597875 @default.
• W2360954857 hasRelatedWork W2063476325 @default.
• W2360954857 hasRelatedWork W2069560471 @default.
• W2360954857 hasRelatedWork W2085388526 @default.
• W2360954857 hasRelatedWork W2108989299 @default.
• W2360954857 hasRelatedWork W2127305881 @default.

• next