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- W2360993779 abstract "A water based near UV negative chemical amplified photoresist was developed,consisting of styrene co N (4 hydroxyphenyl)maleimide with high glass transition temperature (Tg), hexamethoxymethylmelamine (HMMM) triphenyl sulfonium salt.The conditions of photolithograpy process were preliminarily defined.Based on our research,the pattern with 1.39 μm lines and spaces was obtained by the conventional UV photolithography under the optimum parameters." @default.
- W2360993779 created "2016-06-24" @default.
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- W2360993779 date "1998-01-01" @default.
- W2360993779 modified "2023-09-23" @default.
- W2360993779 title "PREPARATION OF WATER BASED NEGATIVE CHEMICAL AMPLIFIED PHOTORESIST WITH HIGH GLASS TRANSITION TEMPERATURE" @default.
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