Matches in SemOpenAlex for { <https://semopenalex.org/work/W2361230997> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W2361230997 abstract "Nano-crystalline silicon thin films(nc-Si:H) with deposition rate of 0.14nm/s were prepared by the conventional plasma enhanced chemical vapor deposition(PECVD) technique under the higher deposition pressure(130Pa),higher RF-power(70W) and low substrate temperature over 100℃.The results showed that the crystalline fraction and deposition rate are in close relation with the substrate temperature.When the substrate temperature changed from 100-150℃,the films change from amorphous phase to crystalline phase.Then the crystalline fraction increases with the increase in substrate temperature.When the substrate temperature is 300℃,the crystalline fraction reaches 82%,dark-conductivity value is about 10-4Ω-1·cm-1,activation energies is 0.31eV.The deposition rate increases slightly with the increasing of substrate temperature when the films are crystallized." @default.
- W2361230997 created "2016-06-24" @default.
- W2361230997 creator A5063844193 @default.
- W2361230997 date "2008-01-01" @default.
- W2361230997 modified "2023-09-25" @default.
- W2361230997 title "Effect of substrate temperature on the nano-crystalline silicon thin film deposited at low temperature" @default.
- W2361230997 hasPublicationYear "2008" @default.
- W2361230997 type Work @default.
- W2361230997 sameAs 2361230997 @default.
- W2361230997 citedByCount "0" @default.
- W2361230997 crossrefType "journal-article" @default.
- W2361230997 hasAuthorship W2361230997A5063844193 @default.
- W2361230997 hasConcept C111368507 @default.
- W2361230997 hasConcept C113196181 @default.
- W2361230997 hasConcept C127313418 @default.
- W2361230997 hasConcept C127413603 @default.
- W2361230997 hasConcept C151730666 @default.
- W2361230997 hasConcept C159985019 @default.
- W2361230997 hasConcept C171250308 @default.
- W2361230997 hasConcept C178790620 @default.
- W2361230997 hasConcept C185592680 @default.
- W2361230997 hasConcept C19067145 @default.
- W2361230997 hasConcept C191897082 @default.
- W2361230997 hasConcept C192562407 @default.
- W2361230997 hasConcept C2777289219 @default.
- W2361230997 hasConcept C2779667780 @default.
- W2361230997 hasConcept C2816523 @default.
- W2361230997 hasConcept C38347018 @default.
- W2361230997 hasConcept C42360764 @default.
- W2361230997 hasConcept C44280652 @default.
- W2361230997 hasConcept C544956773 @default.
- W2361230997 hasConcept C56052488 @default.
- W2361230997 hasConcept C57410435 @default.
- W2361230997 hasConcept C64297162 @default.
- W2361230997 hasConcept C8010536 @default.
- W2361230997 hasConcept C86803240 @default.
- W2361230997 hasConceptScore W2361230997C111368507 @default.
- W2361230997 hasConceptScore W2361230997C113196181 @default.
- W2361230997 hasConceptScore W2361230997C127313418 @default.
- W2361230997 hasConceptScore W2361230997C127413603 @default.
- W2361230997 hasConceptScore W2361230997C151730666 @default.
- W2361230997 hasConceptScore W2361230997C159985019 @default.
- W2361230997 hasConceptScore W2361230997C171250308 @default.
- W2361230997 hasConceptScore W2361230997C178790620 @default.
- W2361230997 hasConceptScore W2361230997C185592680 @default.
- W2361230997 hasConceptScore W2361230997C19067145 @default.
- W2361230997 hasConceptScore W2361230997C191897082 @default.
- W2361230997 hasConceptScore W2361230997C192562407 @default.
- W2361230997 hasConceptScore W2361230997C2777289219 @default.
- W2361230997 hasConceptScore W2361230997C2779667780 @default.
- W2361230997 hasConceptScore W2361230997C2816523 @default.
- W2361230997 hasConceptScore W2361230997C38347018 @default.
- W2361230997 hasConceptScore W2361230997C42360764 @default.
- W2361230997 hasConceptScore W2361230997C44280652 @default.
- W2361230997 hasConceptScore W2361230997C544956773 @default.
- W2361230997 hasConceptScore W2361230997C56052488 @default.
- W2361230997 hasConceptScore W2361230997C57410435 @default.
- W2361230997 hasConceptScore W2361230997C64297162 @default.
- W2361230997 hasConceptScore W2361230997C8010536 @default.
- W2361230997 hasConceptScore W2361230997C86803240 @default.
- W2361230997 hasLocation W23612309971 @default.
- W2361230997 hasOpenAccess W2361230997 @default.
- W2361230997 hasPrimaryLocation W23612309971 @default.
- W2361230997 hasRelatedWork W1985908150 @default.
- W2361230997 hasRelatedWork W2006469791 @default.
- W2361230997 hasRelatedWork W2015818950 @default.
- W2361230997 hasRelatedWork W2032632507 @default.
- W2361230997 hasRelatedWork W2075743390 @default.
- W2361230997 hasRelatedWork W2087367516 @default.
- W2361230997 hasRelatedWork W2090485151 @default.
- W2361230997 hasRelatedWork W2326047729 @default.
- W2361230997 hasRelatedWork W2354186681 @default.
- W2361230997 hasRelatedWork W2355833306 @default.
- W2361230997 hasRelatedWork W2360446747 @default.
- W2361230997 hasRelatedWork W2363212877 @default.
- W2361230997 hasRelatedWork W2364957073 @default.
- W2361230997 hasRelatedWork W2365454132 @default.
- W2361230997 hasRelatedWork W2373433579 @default.
- W2361230997 hasRelatedWork W2377150862 @default.
- W2361230997 hasRelatedWork W2386272195 @default.
- W2361230997 hasRelatedWork W2388224958 @default.
- W2361230997 hasRelatedWork W2511838548 @default.
- W2361230997 hasRelatedWork W3198521352 @default.
- W2361230997 isParatext "false" @default.
- W2361230997 isRetracted "false" @default.
- W2361230997 magId "2361230997" @default.
- W2361230997 workType "article" @default.