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- W2361702010 abstract "In this paper,the mechanism,application and development of the anodic bonding between the glass,ceramic and the like inorganic nonmetal materials and metals or semiconductor materials were introduced. Some successful applicative examples about the anodic bonding used in the production process of MEMS were enumated;some problems and the approaching investigation of the andic bonding were indicated ." @default.
- W2361702010 created "2016-06-24" @default.
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- W2361702010 date "2005-01-01" @default.
- W2361702010 modified "2023-09-27" @default.
- W2361702010 title "The mechanism and its application of anodic bonding of functional ceramics (glass) to metals" @default.
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