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- W2362130833 abstract "The parameters of a micro-capacitive accelerometer were discussed and optimized.The natural frequency and typical modal analysis were carried out by simulation of finite element method.The results show that the frequency response range is wide and the measuring modal frequency is far below other modes,the cross-coupling error can be decreased effectively.The fabrication process based on MEMS technology for making the micro-capacitive acceleration sensor was presented." @default.
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- W2362130833 date "2012-01-01" @default.
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- W2362130833 title "Design and Fabrication Process of Micro-machined Capacitive Acceleration Sensor" @default.
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