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- W2362460643 abstract "This paper simulated the structural microvibration response of the work platform structure of the optical lithography zone in a micro-electronics plant by using the finite element analysis software SAP2000.With the field-measured data of microvibration inputted at the base of the work platform structure to analyze its vibration response,the paper obtained the acceleration time-history curves,the response spectra at three directions with different damping ratios.The results indicate that there are different damping ratios at different directions;and microvibration response at each direction can be approximated as a quadratic curve of damping ratio." @default.
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- W2362460643 title "Study on the effect of damping ratio on the microvibration response of micro-electronics plant" @default.
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