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- W2362530064 abstract "In order to obtain optimized substrate temperature parameters,how to accurately,efficiently measure and control the substrate temperature in CVD diamond films deposition,is critical for CVD diamond deposition technology.The diamond films have been deposited by the home-made DC arc discharge plasma CVD device with a novel substrate temperature control system under opened-loop,closed-loop,opened and closed-loop compound method,respectively.The morphology and quality of diamond films was characterized by scanning electron microscopy and laser Raman spectroscopy.The results indicated that using different substrate temperature control methods has evident effect on the crystal,growth features and quality of the CVD diamond films,in particular,causes a significant change in the secondary nucleation density and non-diamond components in the films.In the premise of ensuring the stability of the control system,as other deposition parameters constant,the substrate temperature control accuracy and control quality real-time altering under different control methods is the main factor affecting the CVD diamond film growth and quality,which the control quality is greatly affected by the control method,and lead to the control precision change from ± 5 ℃ to ±15 ℃.Compared with the substrate temperature control accuracy,the effect of the control quality on the morphology and quality of DC arc discharge PCVD diamond films is even more significant.For this system,only using opened and closed-loop compound control method and maintaining open-loop flow in its work alone 20%,can be obtain the best control accuracy,control quality and high quality of diamond films in the whole DC arc discharge PCVD process." @default.
- W2362530064 created "2016-06-24" @default.
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- W2362530064 date "2012-01-01" @default.
- W2362530064 modified "2023-09-23" @default.
- W2362530064 title "Effects of Substrate Temperature Control Methods on DC Arc Discharge Plasma Chemical Vapor Deposition Diamond Film" @default.
- W2362530064 hasPublicationYear "2012" @default.
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