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- W2362542807 abstract "Contacts to p-AlGaN layer using Ni/Au and Pd/Au are reported. The metals Ni/Au and Pd/Au deposited on p-AlGaN layer (x=0.46) were annealed from 600~850℃. The dependence of the contacts properties on annealing temperature in N2 is examined via TLM measurements. Experiments show some different contacts properties between Ni/Au and Pd/Au on p-AlGaN. The I-V properties of bare p-AlGaN are measured to better analyze the change in I-V curves of Ni/Au and Pd/Au contacts. The results show the effectiveness of Pd/Au than Ni/Au to make the ohmic contacts to p-AlGaN." @default.
- W2362542807 created "2016-06-24" @default.
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- W2362542807 date "2010-01-01" @default.
- W2362542807 modified "2023-09-22" @default.
- W2362542807 title "Ni/Au and Pd/Au contacts to p-AlGaN" @default.
- W2362542807 hasPublicationYear "2010" @default.
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