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- W2362554617 abstract "Base on piezoelectric theory,a solidly mounted resonator(SMR) model was designed to simulate the effect of Bragg reflector to the properties of SMR,considering acoustic loss of Si substrate.The simulation results showed that the quality factor of SMR was greatly improved as the Bragg reflector could reflex acoustic effectively,which reduced the acoustic loss in the substrate and spurious resonance of the substrate.In order to get a better Q,there should be at least three pairs of Bragg reflector using Si3N4 and SiO2.Higher reflectivity of resonant frequency and better quality factor could also be obtained even the thickness of Bragg reflector had little deviation." @default.
- W2362554617 created "2016-06-24" @default.
- W2362554617 creator A5010913760 @default.
- W2362554617 date "2010-01-01" @default.
- W2362554617 modified "2023-09-25" @default.
- W2362554617 title "Simulation Analysis of Effect of Bragg Reflector to the Properties of SMR" @default.
- W2362554617 hasPublicationYear "2010" @default.
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