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- W2362624886 abstract "In this study,60 nm tantalum (Ta) films were deposited with different rates by a sputtering process as diffusion barrier for copper metallization.After annealing,Second Ion Mass Spectrum(SIMS)was employed to characterize the barrier performance.The microstructure of Ta film was investigated by Atom Force Microscope(AFM).It was found that Ta films deposited with different rates show different performance due to their distinct microstructure.This study also shows that the recrystallizing of the Ta film during annealing was one main factor causing the failure of diffusion barrier." @default.
- W2362624886 created "2016-06-24" @default.
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- W2362624886 date "2002-01-01" @default.
- W2362624886 modified "2023-09-26" @default.
- W2362624886 title "Diffusion Barrier Properties of Ta Films Deposited with Different Rates" @default.
- W2362624886 hasPublicationYear "2002" @default.
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