Matches in SemOpenAlex for { <https://semopenalex.org/work/W2362664650> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2362664650 abstract "A method to measure micro-displacements based on grating projection is proposed and analyzed theoretically. A grating is illuminated by a collimated laser beam and projected onto an object to be measured through a 4f optical system with an aperture in its frequency plane. The grating projection is imaged on a detection grating through another 4f optical system after reflected by the surface of the object. The detection grating is imaged on a detector and its imaging beam is modulated by a photoelastic modulator. The micro-displacement of the object is obtained by detecting the light intensity on detector. In experiments, the feasibility is verified and the repeatability of the method is less than 25 nm (1σ)." @default.
- W2362664650 created "2016-06-24" @default.
- W2362664650 creator A5002339439 @default.
- W2362664650 date "2005-01-01" @default.
- W2362664650 modified "2023-09-24" @default.
- W2362664650 title "Micro-Displacement Measurement Based on Grating Projection" @default.
- W2362664650 hasPublicationYear "2005" @default.
- W2362664650 type Work @default.
- W2362664650 sameAs 2362664650 @default.
- W2362664650 citedByCount "0" @default.
- W2362664650 crossrefType "journal-article" @default.
- W2362664650 hasAuthorship W2362664650A5002339439 @default.
- W2362664650 hasConcept C107551265 @default.
- W2362664650 hasConcept C11413529 @default.
- W2362664650 hasConcept C120665830 @default.
- W2362664650 hasConcept C121332964 @default.
- W2362664650 hasConcept C126753812 @default.
- W2362664650 hasConcept C1363856 @default.
- W2362664650 hasConcept C154020017 @default.
- W2362664650 hasConcept C15744967 @default.
- W2362664650 hasConcept C168834538 @default.
- W2362664650 hasConcept C185592680 @default.
- W2362664650 hasConcept C187384414 @default.
- W2362664650 hasConcept C192562407 @default.
- W2362664650 hasConcept C24890656 @default.
- W2362664650 hasConcept C2777813233 @default.
- W2362664650 hasConcept C34445779 @default.
- W2362664650 hasConcept C41008148 @default.
- W2362664650 hasConcept C43617362 @default.
- W2362664650 hasConcept C520434653 @default.
- W2362664650 hasConcept C542102704 @default.
- W2362664650 hasConcept C57493831 @default.
- W2362664650 hasConcept C78336883 @default.
- W2362664650 hasConcept C94915269 @default.
- W2362664650 hasConceptScore W2362664650C107551265 @default.
- W2362664650 hasConceptScore W2362664650C11413529 @default.
- W2362664650 hasConceptScore W2362664650C120665830 @default.
- W2362664650 hasConceptScore W2362664650C121332964 @default.
- W2362664650 hasConceptScore W2362664650C126753812 @default.
- W2362664650 hasConceptScore W2362664650C1363856 @default.
- W2362664650 hasConceptScore W2362664650C154020017 @default.
- W2362664650 hasConceptScore W2362664650C15744967 @default.
- W2362664650 hasConceptScore W2362664650C168834538 @default.
- W2362664650 hasConceptScore W2362664650C185592680 @default.
- W2362664650 hasConceptScore W2362664650C187384414 @default.
- W2362664650 hasConceptScore W2362664650C192562407 @default.
- W2362664650 hasConceptScore W2362664650C24890656 @default.
- W2362664650 hasConceptScore W2362664650C2777813233 @default.
- W2362664650 hasConceptScore W2362664650C34445779 @default.
- W2362664650 hasConceptScore W2362664650C41008148 @default.
- W2362664650 hasConceptScore W2362664650C43617362 @default.
- W2362664650 hasConceptScore W2362664650C520434653 @default.
- W2362664650 hasConceptScore W2362664650C542102704 @default.
- W2362664650 hasConceptScore W2362664650C57493831 @default.
- W2362664650 hasConceptScore W2362664650C78336883 @default.
- W2362664650 hasConceptScore W2362664650C94915269 @default.
- W2362664650 hasLocation W23626646501 @default.
- W2362664650 hasOpenAccess W2362664650 @default.
- W2362664650 hasPrimaryLocation W23626646501 @default.
- W2362664650 hasRelatedWork W1974984587 @default.
- W2362664650 hasRelatedWork W1980160751 @default.
- W2362664650 hasRelatedWork W2028270100 @default.
- W2362664650 hasRelatedWork W2039998747 @default.
- W2362664650 hasRelatedWork W2069984506 @default.
- W2362664650 hasRelatedWork W2131402034 @default.
- W2362664650 hasRelatedWork W2379882549 @default.
- W2362664650 hasRelatedWork W2908799594 @default.
- W2362664650 hasRelatedWork W2832325218 @default.
- W2362664650 hasRelatedWork W2838601100 @default.
- W2362664650 hasRelatedWork W2845541580 @default.
- W2362664650 hasRelatedWork W2854840355 @default.
- W2362664650 hasRelatedWork W2872493724 @default.
- W2362664650 hasRelatedWork W2966238833 @default.
- W2362664650 hasRelatedWork W2982754416 @default.
- W2362664650 hasRelatedWork W2986625609 @default.
- W2362664650 hasRelatedWork W3001438066 @default.
- W2362664650 hasRelatedWork W3002300043 @default.
- W2362664650 hasRelatedWork W3027039210 @default.
- W2362664650 hasRelatedWork W3156279726 @default.
- W2362664650 isParatext "false" @default.
- W2362664650 isRetracted "false" @default.
- W2362664650 magId "2362664650" @default.
- W2362664650 workType "article" @default.