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- W2362941606 abstract "To accomplish complex plane model measurement,a cyclic simplex method of edge feature extraction and seed filling digital image processing technology are presented to solve the problem of phase recovery of a complex plane model,and by using the wavelength synthesis technique and excess fraction method in phase-stepping interference system,both the integer part and the fraction of the order of interference fringe of a plane model with step boundary are measured.A repeatability of 10nm is achieved in measurements of two kinds of step plane models.The measurement results are compared to that of a Nanoscale Coordinate Measuring Machine.The maximum difference between the data of two systems is 8nm.The reliability of experimental data as well as the advantages and disadvantages of the two measuring instruments are analyzed.This research provides a new idea for measurements of complex plane models." @default.
- W2362941606 created "2016-06-24" @default.
- W2362941606 creator A5064064496 @default.
- W2362941606 date "2011-01-01" @default.
- W2362941606 modified "2023-09-23" @default.
- W2362941606 title "Interferometry for Measurement of Plane with Step Boundary" @default.
- W2362941606 hasPublicationYear "2011" @default.
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