Matches in SemOpenAlex for { <https://semopenalex.org/work/W2363060770> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2363060770 abstract "An inductively coupled PECVD system was designed and fabricated with the coupling coils outside the deposition chamber in order to avoid possible metallic pollution of the films.SiO2 thin films were deposited on n-type silicon wafer using this new PECVD system.SiO2 thin films were characterized by SEM(Scanning Electron Microscope) and FTIR(Fourier Transform Infrared Spectroscopy).The results show that SiO2 thin films are smooth,homogeneous and can be deposited in a large area by the PECVD system.Furthermore,a thickness empirical formula of film was derived to calculate the thickness conveniently at different time and temperature in the power of 50W." @default.
- W2363060770 created "2016-06-24" @default.
- W2363060770 creator A5046390841 @default.
- W2363060770 date "2013-01-01" @default.
- W2363060770 modified "2023-09-24" @default.
- W2363060770 title "Inductively Coupled PECVD Deposition of SiO_2 Thin Films at Low Temperature with Coupling Coils outside the Deposition Chamber" @default.
- W2363060770 hasPublicationYear "2013" @default.
- W2363060770 type Work @default.
- W2363060770 sameAs 2363060770 @default.
- W2363060770 citedByCount "0" @default.
- W2363060770 crossrefType "journal-article" @default.
- W2363060770 hasAuthorship W2363060770A5046390841 @default.
- W2363060770 hasConcept C113196181 @default.
- W2363060770 hasConcept C120665830 @default.
- W2363060770 hasConcept C121332964 @default.
- W2363060770 hasConcept C151730666 @default.
- W2363060770 hasConcept C159985019 @default.
- W2363060770 hasConcept C160671074 @default.
- W2363060770 hasConcept C160892712 @default.
- W2363060770 hasConcept C171250308 @default.
- W2363060770 hasConcept C185592680 @default.
- W2363060770 hasConcept C19067145 @default.
- W2363060770 hasConcept C192562407 @default.
- W2363060770 hasConcept C26771246 @default.
- W2363060770 hasConcept C2816523 @default.
- W2363060770 hasConcept C38347018 @default.
- W2363060770 hasConcept C43617362 @default.
- W2363060770 hasConcept C49040817 @default.
- W2363060770 hasConcept C544956773 @default.
- W2363060770 hasConcept C62520636 @default.
- W2363060770 hasConcept C64297162 @default.
- W2363060770 hasConcept C82706917 @default.
- W2363060770 hasConcept C86803240 @default.
- W2363060770 hasConcept C95974651 @default.
- W2363060770 hasConceptScore W2363060770C113196181 @default.
- W2363060770 hasConceptScore W2363060770C120665830 @default.
- W2363060770 hasConceptScore W2363060770C121332964 @default.
- W2363060770 hasConceptScore W2363060770C151730666 @default.
- W2363060770 hasConceptScore W2363060770C159985019 @default.
- W2363060770 hasConceptScore W2363060770C160671074 @default.
- W2363060770 hasConceptScore W2363060770C160892712 @default.
- W2363060770 hasConceptScore W2363060770C171250308 @default.
- W2363060770 hasConceptScore W2363060770C185592680 @default.
- W2363060770 hasConceptScore W2363060770C19067145 @default.
- W2363060770 hasConceptScore W2363060770C192562407 @default.
- W2363060770 hasConceptScore W2363060770C26771246 @default.
- W2363060770 hasConceptScore W2363060770C2816523 @default.
- W2363060770 hasConceptScore W2363060770C38347018 @default.
- W2363060770 hasConceptScore W2363060770C43617362 @default.
- W2363060770 hasConceptScore W2363060770C49040817 @default.
- W2363060770 hasConceptScore W2363060770C544956773 @default.
- W2363060770 hasConceptScore W2363060770C62520636 @default.
- W2363060770 hasConceptScore W2363060770C64297162 @default.
- W2363060770 hasConceptScore W2363060770C82706917 @default.
- W2363060770 hasConceptScore W2363060770C86803240 @default.
- W2363060770 hasConceptScore W2363060770C95974651 @default.
- W2363060770 hasLocation W23630607701 @default.
- W2363060770 hasOpenAccess W2363060770 @default.
- W2363060770 hasPrimaryLocation W23630607701 @default.
- W2363060770 hasRelatedWork W1571291138 @default.
- W2363060770 hasRelatedWork W1805275 @default.
- W2363060770 hasRelatedWork W1995221038 @default.
- W2363060770 hasRelatedWork W2002945813 @default.
- W2363060770 hasRelatedWork W2011849397 @default.
- W2363060770 hasRelatedWork W2013499035 @default.
- W2363060770 hasRelatedWork W2014539000 @default.
- W2363060770 hasRelatedWork W2026196966 @default.
- W2363060770 hasRelatedWork W2031135990 @default.
- W2363060770 hasRelatedWork W2035519082 @default.
- W2363060770 hasRelatedWork W2037997937 @default.
- W2363060770 hasRelatedWork W2039334610 @default.
- W2363060770 hasRelatedWork W2057337421 @default.
- W2363060770 hasRelatedWork W2076671382 @default.
- W2363060770 hasRelatedWork W2385953719 @default.
- W2363060770 hasRelatedWork W2507380165 @default.
- W2363060770 hasRelatedWork W2554798557 @default.
- W2363060770 hasRelatedWork W2801725966 @default.
- W2363060770 hasRelatedWork W3027194656 @default.
- W2363060770 hasRelatedWork W3140075657 @default.
- W2363060770 isParatext "false" @default.
- W2363060770 isRetracted "false" @default.
- W2363060770 magId "2363060770" @default.
- W2363060770 workType "article" @default.