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- W2363518831 abstract "The beam propagation method is used to investigate the absorber waveguide effect in deep micron synchrotron radiation x ray lithography,and the resist profile after x ray exposure is calculated theoretically.Using object oriented programming technology,a simulation software called XLSS1 0 has been developed recently.The detail of this software is described in this paper." @default.
- W2363518831 created "2016-06-24" @default.
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- W2363518831 date "2001-01-01" @default.
- W2363518831 modified "2023-09-26" @default.
- W2363518831 title "Deep sub-micron synchrotron radiation x-ray lithography simulation" @default.
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