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- W2363842694 abstract "Titanium- doped ceria Ce1- x Ti x O2( x =0,0. 1,0. 2,0. 3) powders were prepared via a co- precipitation method,using ethylene glycol( EG) / water as reaction mixed solvent and with precursor treatment of butanol azeotropic distillation. Moreover,the crystalline phase structure,morphology,zeta potential were characterized by X- ray diffraction( XRD),Transmission electron microscopy( TEM) and zeta potential analysis respectively. The polishing performance of the as- synthesized Ti- doped ceria abrasives for Silicon wafer was evaluated by the material removal rate( MRR) and atomic force microscopy( AFM). The results show that the ceria powder and Ti- doped ceria synthesized at 900℃ possesses nano- sized spheroidal morphology with a diameter of 40 ~ 50nm. A maximum MRR value of 139 nm·min- 1was obtained by using Ce0. 8Ti0. 2O2 nano- sized abrasives as a polishing powder for silicon wafer,and the surface roughness R a in a 1. 0μm × 1. 0μm area were found to be of 0. 254 nm. This MRR value is ca. 2. 0 times of that obtained from by using pure ceria nanoparticles( that is,67nm·min- 1). However,MRR value of Ce0. 9Ti0. 1O2 and Ce0. 7Ti0. 3O2 abrasives are 112nm·min- 1and 89nm·min- 1,respectively. The facts indicate that the polishing performance for silicon wafer of nano-sized ceria abrasives is significantly improved by Titanium- doping,which closely related to the increase of the zeta potential of Ti-doped ceria and the formation of CeTi2O6." @default.
- W2363842694 created "2016-06-24" @default.
- W2363842694 creator A5049721152 @default.
- W2363842694 date "2013-01-01" @default.
- W2363842694 modified "2023-09-27" @default.
- W2363842694 title "Improvement on Polishing Performance for Silicon Wafer of Nano-sized Ceria Abrasives by Tianium-doping" @default.
- W2363842694 hasPublicationYear "2013" @default.
- W2363842694 type Work @default.
- W2363842694 sameAs 2363842694 @default.
- W2363842694 citedByCount "0" @default.
- W2363842694 crossrefType "journal-article" @default.
- W2363842694 hasAuthorship W2363842694A5049721152 @default.
- W2363842694 hasConcept C107054158 @default.
- W2363842694 hasConcept C121332964 @default.
- W2363842694 hasConcept C127413603 @default.
- W2363842694 hasConcept C138113353 @default.
- W2363842694 hasConcept C153294291 @default.
- W2363842694 hasConcept C155672457 @default.
- W2363842694 hasConcept C159985019 @default.
- W2363842694 hasConcept C160671074 @default.
- W2363842694 hasConcept C171250308 @default.
- W2363842694 hasConcept C180088628 @default.
- W2363842694 hasConcept C191897082 @default.
- W2363842694 hasConcept C192562407 @default.
- W2363842694 hasConcept C2780357685 @default.
- W2363842694 hasConcept C42360764 @default.
- W2363842694 hasConcept C49040817 @default.
- W2363842694 hasConcept C506065880 @default.
- W2363842694 hasConcept C544956773 @default.
- W2363842694 hasConcept C57863236 @default.
- W2363842694 hasConcept C86181022 @default.
- W2363842694 hasConceptScore W2363842694C107054158 @default.
- W2363842694 hasConceptScore W2363842694C121332964 @default.
- W2363842694 hasConceptScore W2363842694C127413603 @default.
- W2363842694 hasConceptScore W2363842694C138113353 @default.
- W2363842694 hasConceptScore W2363842694C153294291 @default.
- W2363842694 hasConceptScore W2363842694C155672457 @default.
- W2363842694 hasConceptScore W2363842694C159985019 @default.
- W2363842694 hasConceptScore W2363842694C160671074 @default.
- W2363842694 hasConceptScore W2363842694C171250308 @default.
- W2363842694 hasConceptScore W2363842694C180088628 @default.
- W2363842694 hasConceptScore W2363842694C191897082 @default.
- W2363842694 hasConceptScore W2363842694C192562407 @default.
- W2363842694 hasConceptScore W2363842694C2780357685 @default.
- W2363842694 hasConceptScore W2363842694C42360764 @default.
- W2363842694 hasConceptScore W2363842694C49040817 @default.
- W2363842694 hasConceptScore W2363842694C506065880 @default.
- W2363842694 hasConceptScore W2363842694C544956773 @default.
- W2363842694 hasConceptScore W2363842694C57863236 @default.
- W2363842694 hasConceptScore W2363842694C86181022 @default.
- W2363842694 hasLocation W23638426941 @default.
- W2363842694 hasOpenAccess W2363842694 @default.
- W2363842694 hasPrimaryLocation W23638426941 @default.
- W2363842694 hasRelatedWork W1699245060 @default.
- W2363842694 hasRelatedWork W1831668757 @default.
- W2363842694 hasRelatedWork W1992202458 @default.
- W2363842694 hasRelatedWork W2038343000 @default.
- W2363842694 hasRelatedWork W2041475008 @default.
- W2363842694 hasRelatedWork W2045172299 @default.
- W2363842694 hasRelatedWork W2077432521 @default.
- W2363842694 hasRelatedWork W2143624260 @default.
- W2363842694 hasRelatedWork W2365615497 @default.
- W2363842694 hasRelatedWork W2386901901 @default.
- W2363842694 hasRelatedWork W2393908657 @default.
- W2363842694 hasRelatedWork W2462313654 @default.
- W2363842694 hasRelatedWork W2768024958 @default.
- W2363842694 hasRelatedWork W2800567801 @default.
- W2363842694 hasRelatedWork W2903357719 @default.
- W2363842694 hasRelatedWork W2934451288 @default.
- W2363842694 hasRelatedWork W2962202362 @default.
- W2363842694 hasRelatedWork W2980263273 @default.
- W2363842694 hasRelatedWork W2984244655 @default.
- W2363842694 hasRelatedWork W3131380438 @default.
- W2363842694 isParatext "false" @default.
- W2363842694 isRetracted "false" @default.
- W2363842694 magId "2363842694" @default.
- W2363842694 workType "article" @default.