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- W2364173070 abstract "X-ray lithography is very suited for the fabrication of deep-submicron T-shaped gate,because its combination of high resolution,large exposure window and high throughout satisfies the requirements for MMIC manufacturing process.In this paper,the home-made x-ray mask fabri-cation process is introduced firstly,then a two layer resists method which is used to fabricate deep-submicron T-shaped gate and some initial research results are described,and the domestic deep-submicron lithography status is analyzed briefly at last." @default.
- W2364173070 created "2016-06-24" @default.
- W2364173070 creator A5060718181 @default.
- W2364173070 date "2002-01-01" @default.
- W2364173070 modified "2023-09-25" @default.
- W2364173070 title "Deep-submicron T-shaped gate fabrication technology using syn chrotron radiation x-ray lithography" @default.
- W2364173070 hasPublicationYear "2002" @default.
- W2364173070 type Work @default.
- W2364173070 sameAs 2364173070 @default.
- W2364173070 citedByCount "0" @default.
- W2364173070 crossrefType "journal-article" @default.
- W2364173070 hasAuthorship W2364173070A5060718181 @default.
- W2364173070 hasConcept C105487726 @default.
- W2364173070 hasConcept C136525101 @default.
- W2364173070 hasConcept C142724271 @default.
- W2364173070 hasConcept C163581340 @default.
- W2364173070 hasConcept C171250308 @default.
- W2364173070 hasConcept C182873914 @default.
- W2364173070 hasConcept C192562407 @default.
- W2364173070 hasConcept C200274948 @default.
- W2364173070 hasConcept C204223013 @default.
- W2364173070 hasConcept C204787440 @default.
- W2364173070 hasConcept C2779227376 @default.
- W2364173070 hasConcept C41794268 @default.
- W2364173070 hasConcept C49040817 @default.
- W2364173070 hasConcept C53524968 @default.
- W2364173070 hasConcept C71924100 @default.
- W2364173070 hasConceptScore W2364173070C105487726 @default.
- W2364173070 hasConceptScore W2364173070C136525101 @default.
- W2364173070 hasConceptScore W2364173070C142724271 @default.
- W2364173070 hasConceptScore W2364173070C163581340 @default.
- W2364173070 hasConceptScore W2364173070C171250308 @default.
- W2364173070 hasConceptScore W2364173070C182873914 @default.
- W2364173070 hasConceptScore W2364173070C192562407 @default.
- W2364173070 hasConceptScore W2364173070C200274948 @default.
- W2364173070 hasConceptScore W2364173070C204223013 @default.
- W2364173070 hasConceptScore W2364173070C204787440 @default.
- W2364173070 hasConceptScore W2364173070C2779227376 @default.
- W2364173070 hasConceptScore W2364173070C41794268 @default.
- W2364173070 hasConceptScore W2364173070C49040817 @default.
- W2364173070 hasConceptScore W2364173070C53524968 @default.
- W2364173070 hasConceptScore W2364173070C71924100 @default.
- W2364173070 hasLocation W23641730701 @default.
- W2364173070 hasOpenAccess W2364173070 @default.
- W2364173070 hasPrimaryLocation W23641730701 @default.
- W2364173070 hasRelatedWork W1514992787 @default.
- W2364173070 hasRelatedWork W1599891132 @default.
- W2364173070 hasRelatedWork W1618604960 @default.
- W2364173070 hasRelatedWork W1965807698 @default.
- W2364173070 hasRelatedWork W1972760701 @default.
- W2364173070 hasRelatedWork W2007789449 @default.
- W2364173070 hasRelatedWork W2043320586 @default.
- W2364173070 hasRelatedWork W2046239672 @default.
- W2364173070 hasRelatedWork W2048656786 @default.
- W2364173070 hasRelatedWork W2050411782 @default.
- W2364173070 hasRelatedWork W2067011627 @default.
- W2364173070 hasRelatedWork W2067362339 @default.
- W2364173070 hasRelatedWork W2113625535 @default.
- W2364173070 hasRelatedWork W2128523187 @default.
- W2364173070 hasRelatedWork W2149374085 @default.
- W2364173070 hasRelatedWork W2345933932 @default.
- W2364173070 hasRelatedWork W2354334246 @default.
- W2364173070 hasRelatedWork W2530640164 @default.
- W2364173070 hasRelatedWork W880046589 @default.
- W2364173070 hasRelatedWork W2014150771 @default.
- W2364173070 isParatext "false" @default.
- W2364173070 isRetracted "false" @default.
- W2364173070 magId "2364173070" @default.
- W2364173070 workType "article" @default.