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- W2364288955 abstract "BST thin films are prepared by Sol Gel method.The phase structure and microstructure of BST thin films are studied by XRD,SEM.The results show that cubic perovskite phase structure has formed perfectly after the BST films are fired at 650 °C.The film surface densifies and pores decrease with the increase of heating temperature.At 900 °C,the film surface becomes smooth,free of cracks and pores,and the spherical grains distribute uniformly.The dielectric constant and dissipation factor of the 0 1 μm BST thin films on Pt/RuO 2 bottom electrodes were 542 and 0 035 at zero bias voltage.The leakage current density of BST thin films on RuO 2 bottom electrodes was 0 52 μA/cm 2 at 1 5 V which was about one order of magnitude higher than leakage current density(72 nA/cm 2 at 1 5 V)of BST capacitor with Pt/RuO 2 bottom electrodes.Therefore,the Pt/RuO 2 hybrid bottom electrodes overcome the difficulty in fine patterning of thick Pt and the weakness of higher leakage current of BST thin films spin coated on RuO 2 bottom electrodes.It can be the best choice to prepare the capacitors arrays of ultralarge scale dynamic random access memories(DRAMs)" @default.
- W2364288955 created "2016-06-24" @default.
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- W2364288955 date "2002-01-01" @default.
- W2364288955 modified "2023-09-25" @default.
- W2364288955 title "Studies on the Electrical Properties of BST Thin Films Prepared by Sol-Gel Method" @default.
- W2364288955 hasPublicationYear "2002" @default.
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