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- W2364320761 abstract "The linearly coaxially coupled microwave plasma CVD device is a new microwave plasma CVD device bringing an axial extended plasma cylinder through a microwave antenna.As the plasma extends along the microwave antenna,its distribution is not affected by the metal workpiece location.However,the plasma distribution is easily affected by it in some other microwave plasma CVD devices such as quartz tube type, quartz bell-jar type and stainless steel resonant chamber type.The paper will first discuss the operating principle of the linearly coaxially coupled microwave plasma CVD device and then introduce the diamond coating deposition experiment using the device.The experimental results show the higher-quality diamond coating can be deposited on the metal workpiece using the linearly coaxially coupled microwave plasma CVD device." @default.
- W2364320761 created "2016-06-24" @default.
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- W2364320761 date "2004-01-01" @default.
- W2364320761 modified "2023-09-25" @default.
- W2364320761 title "Diamond Coatings Deposition Using the Linearly Coaxially Coupled Microwave Plasma CVD Device" @default.
- W2364320761 hasPublicationYear "2004" @default.
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