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- W2364355559 abstract "A two-dimension micromechanical inclinometer with a simple structure was designed,which consists of a butterfly-shape silicon mass bulk that is connected by four crossed silicon beams and a BSG glass substrate with a function of over-range protection.The inclinometer could measure the rotating angles of the mass bulk with respect to the two axes within a single sensor element simultaneously.After the stress distribution on a beam was analyzed,an analytic relation of the stress with the angles was obtained and it was proved by the finite-element method.The result indicates that the theoretic sensitivity is 0.75 mV per angle of inclination." @default.
- W2364355559 created "2016-06-24" @default.
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- W2364355559 date "2007-01-01" @default.
- W2364355559 modified "2023-09-25" @default.
- W2364355559 title "Design of a Two Dimension Si Micromechanical Inclinometer" @default.
- W2364355559 hasPublicationYear "2007" @default.
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