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- W2364395592 abstract "Micro Milling technology is used in the manufacturing of the inertial MEMS components with 3D micro structures. This kind of inertial MEMS components are made of high-performance elastic alloy with characteristic dimension of 10 μm~100 μm and machining accuracy of ±1 μm. It also has strict requirement on the residual stress. With the self-designed 3 axis micro milling machine, the optical cutting parameters are studied and the components are successfully manufactured. With micro-bridge method, elastic modulus and residual stress are measured." @default.
- W2364395592 created "2016-06-24" @default.
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- W2364395592 date "2006-01-01" @default.
- W2364395592 modified "2023-09-23" @default.
- W2364395592 title "Micro Milling of the Inertial Components with 3D structure" @default.
- W2364395592 hasPublicationYear "2006" @default.
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