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- W2364398974 abstract "The magnetic coupling force existing when a magnetic levitation (maglev) feeding mechanism moves was analyzed. With a V-shaped guide rail in its maglev system and a balance point automatically regressed, the maglev feeding mechanism has a high guiding accuracy, and can be applied to IT manufacturing devices such as laser lithography tools to meet the needs of the super-clean condition and the precision positioning. Then the distribution of the magnetic forces in the maglev system was analyzed, and a set of formulas of the coupling was derived. The results show that the magnetic force coupling exists in the maglev system's controlling process. When the feeding mechanism moves its offset along the y-axis, the magnetic forces of the two magnets along the y-axis and the z-axis must couple each other; but when the feeding mechanism moves its offset along the z-axis, there will be no magnetic force coupling between the two magnets along the y-axis and the z-axis. The magnetic force coupling can be reduced or even be eliminated after a decoupling control with compensation added into the maglev controlling system." @default.
- W2364398974 created "2016-06-24" @default.
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- W2364398974 date "2004-01-01" @default.
- W2364398974 modified "2023-09-22" @default.
- W2364398974 title "Magnetic force coupling in maglev feeding mechanism" @default.
- W2364398974 hasPublicationYear "2004" @default.
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