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- W2364876786 abstract "In this article,a method of dividing batches into sub-phases was researched.First,the batches of data were unfolded into two-dimention based on the batch direction.All the data from the certain sample time to the last formed the data phase correspond to the sample time.The cumulative percent variance of the first principle component) could be obtained after principal component analysis was applied to all the data phases.Then the value change of the was used as an indicator of phase changing.This method was applied to the data collected from penicillin simulation batch process.The data was divided into phases abviously and showed consistent with the thalli's growth.In the end,the proposed method was applied to the actual semiconductor production process data as well,and the segment results verified the effectiveness of the algorithm." @default.
- W2364876786 created "2016-06-24" @default.
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- W2364876786 date "2013-01-01" @default.
- W2364876786 modified "2023-09-22" @default.
- W2364876786 title "Application of CPV(1) Phase Dividing Method for Batch Process" @default.
- W2364876786 hasPublicationYear "2013" @default.
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