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- W2365718257 abstract "With a thorough description of processing,sealed testifying and application in microelectronic mechanical system on the basis of an introduction to the origin and features of microelectronic mechanical system,proposed and forecast broad developmental prospects." @default.
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- W2365718257 date "2006-01-01" @default.
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- W2365718257 title "Development and Application of Microelectronic Mechanical System" @default.
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