Matches in SemOpenAlex for { <https://semopenalex.org/work/W2365725820> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2365725820 startingPage "301" @default.
- W2365725820 abstract "With the development of nano fabrication techniques,nano structure devices will be the basis of the next generation integrated circuits.We report process of Si quantum wire and dot based on EBL and RIE processes and process of nano structure metal gate based on EBL,electron beam evaporation and lift off techniques.Single electron transistors (SETs) on p type SIMOX substrates were also fabricated based on the processes.Coulomb blockade and single electron tunneling are observed in the SETs." @default.
- W2365725820 created "2016-06-24" @default.
- W2365725820 creator A5005199475 @default.
- W2365725820 creator A5015813737 @default.
- W2365725820 creator A5044609796 @default.
- W2365725820 creator A5088993170 @default.
- W2365725820 date "2003-01-01" @default.
- W2365725820 modified "2023-10-11" @default.
- W2365725820 title "Fabrication techniques of nano-structure" @default.
- W2365725820 hasPublicationYear "2003" @default.
- W2365725820 type Work @default.
- W2365725820 sameAs 2365725820 @default.
- W2365725820 citedByCount "0" @default.
- W2365725820 crossrefType "journal-article" @default.
- W2365725820 hasAuthorship W2365725820A5005199475 @default.
- W2365725820 hasAuthorship W2365725820A5015813737 @default.
- W2365725820 hasAuthorship W2365725820A5044609796 @default.
- W2365725820 hasAuthorship W2365725820A5088993170 @default.
- W2365725820 hasConcept C117206207 @default.
- W2365725820 hasConcept C119599485 @default.
- W2365725820 hasConcept C120398109 @default.
- W2365725820 hasConcept C124657808 @default.
- W2365725820 hasConcept C127413603 @default.
- W2365725820 hasConcept C136525101 @default.
- W2365725820 hasConcept C141400236 @default.
- W2365725820 hasConcept C142724271 @default.
- W2365725820 hasConcept C159985019 @default.
- W2365725820 hasConcept C165801399 @default.
- W2365725820 hasConcept C171250308 @default.
- W2365725820 hasConcept C172385210 @default.
- W2365725820 hasConcept C192562407 @default.
- W2365725820 hasConcept C200274948 @default.
- W2365725820 hasConcept C204787440 @default.
- W2365725820 hasConcept C2779227376 @default.
- W2365725820 hasConcept C2780357685 @default.
- W2365725820 hasConcept C49040817 @default.
- W2365725820 hasConcept C530198007 @default.
- W2365725820 hasConcept C53524968 @default.
- W2365725820 hasConcept C71924100 @default.
- W2365725820 hasConceptScore W2365725820C117206207 @default.
- W2365725820 hasConceptScore W2365725820C119599485 @default.
- W2365725820 hasConceptScore W2365725820C120398109 @default.
- W2365725820 hasConceptScore W2365725820C124657808 @default.
- W2365725820 hasConceptScore W2365725820C127413603 @default.
- W2365725820 hasConceptScore W2365725820C136525101 @default.
- W2365725820 hasConceptScore W2365725820C141400236 @default.
- W2365725820 hasConceptScore W2365725820C142724271 @default.
- W2365725820 hasConceptScore W2365725820C159985019 @default.
- W2365725820 hasConceptScore W2365725820C165801399 @default.
- W2365725820 hasConceptScore W2365725820C171250308 @default.
- W2365725820 hasConceptScore W2365725820C172385210 @default.
- W2365725820 hasConceptScore W2365725820C192562407 @default.
- W2365725820 hasConceptScore W2365725820C200274948 @default.
- W2365725820 hasConceptScore W2365725820C204787440 @default.
- W2365725820 hasConceptScore W2365725820C2779227376 @default.
- W2365725820 hasConceptScore W2365725820C2780357685 @default.
- W2365725820 hasConceptScore W2365725820C49040817 @default.
- W2365725820 hasConceptScore W2365725820C530198007 @default.
- W2365725820 hasConceptScore W2365725820C53524968 @default.
- W2365725820 hasConceptScore W2365725820C71924100 @default.
- W2365725820 hasIssue "2" @default.
- W2365725820 hasLocation W23657258201 @default.
- W2365725820 hasOpenAccess W2365725820 @default.
- W2365725820 hasPrimaryLocation W23657258201 @default.
- W2365725820 hasRelatedWork W1989683286 @default.
- W2365725820 hasRelatedWork W1991872722 @default.
- W2365725820 hasRelatedWork W2003515563 @default.
- W2365725820 hasRelatedWork W2012081847 @default.
- W2365725820 hasRelatedWork W2017533904 @default.
- W2365725820 hasRelatedWork W2029963208 @default.
- W2365725820 hasRelatedWork W2030400741 @default.
- W2365725820 hasRelatedWork W2034628323 @default.
- W2365725820 hasRelatedWork W2044360753 @default.
- W2365725820 hasRelatedWork W2070848682 @default.
- W2365725820 hasRelatedWork W2074571355 @default.
- W2365725820 hasRelatedWork W2159409092 @default.
- W2365725820 hasRelatedWork W2171945953 @default.
- W2365725820 hasRelatedWork W2174093491 @default.
- W2365725820 hasRelatedWork W2362508322 @default.
- W2365725820 hasRelatedWork W2387958952 @default.
- W2365725820 hasRelatedWork W2910670848 @default.
- W2365725820 hasRelatedWork W3023093678 @default.
- W2365725820 hasRelatedWork W3099279027 @default.
- W2365725820 hasRelatedWork W3104450399 @default.
- W2365725820 hasVolume "31" @default.
- W2365725820 isParatext "false" @default.
- W2365725820 isRetracted "false" @default.
- W2365725820 magId "2365725820" @default.
- W2365725820 workType "article" @default.