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- W2365737377 abstract "By ablating ceramic SiC target with pulsed ArF laser, SiC films are deposited on the Si(111) substract at temperature 800℃.After the post deposition annealing at the temperature of 920℃ in high vacuum (10 -3 Pa),crystal α SiC films are obtained.The properties of the films before and after annealing such as the surface morphology, crystal structure,composition,chemical state of the element and photoluminescence,etc. are studied by Fouriour Transform Infrared spectrum (FTIR),X|ray photoelectron spectrum (XPS),scanning electron microscope (SEM),X|ray diffraction (XRD),transmission electron spectrum (TEM),photoluminescence (PL) methods. From analysis it is obtained that SiC film has grown up to a highly oriented crystal α SiC(0001)∥Si(111) epitaxial film through an amorphous nucleation and growth process at the fairly low temperature of 920℃.Ratio of C and Si is about 1 01 inside the film.There are some contaminated carbon and a small quantity of oxidized Si and C on the surface.Excited by ultraviolet light with the wavelength of 280nm at room temperature,the films give out a fairly strong emission peak at 341nm,whose FWHM is 45nm,as shows rather good shortwave photoluminescence quality.The mechanism of the film lighting emission deserve further investigation." @default.
- W2365737377 created "2016-06-24" @default.
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- W2365737377 date "2000-01-01" @default.
- W2365737377 modified "2023-09-27" @default.
- W2365737377 title "Preparation of Crystal Oriented α-SiC Films by Pulsed ArF Laser Deposition on Si(111)+*" @default.
- W2365737377 hasPublicationYear "2000" @default.
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