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- W2365866900 abstract "CaF2 crystal with broad wavelength range and high transmittance has become the focus of the semiconductor industry with the development of UV-lithography. Therefore, the size and quality of CaF2 crystal have gained continuous enhancement. Combined with the fundamental properties of CaF2, the main CaF2 crystal growth methods and existing problems were summarized. Those effective ways of improving the size, quality and rate of production of UV-graded CaF2 crystal were introduced from the purification of raw materials to the surface finish of crystal." @default.
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- W2365866900 date "2003-01-01" @default.
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- W2365866900 title "Research and Progress of CaF_2 Crystal Growth" @default.
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