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- W2366165051 abstract "To handle thermal budget in SiGe BiCMOS process,a non-selective pattern epitaxy technology has been developed.SEM,AFM,XRD and dislocation density measurements were performed,which showed that the SiGe film's RMS roughness is 0.45 nm,and dislocation density is from 0.3×103 cm-2 to 1.2×103 cm-2.No dislocation accumulation exists on the boundary of the windows,which indicates the high quality of the SiGe film.The experiment results show that the technology meets the requirements of device fabrication by SiGe BiCMOS process." @default.
- W2366165051 created "2016-06-24" @default.
- W2366165051 creator A5017947172 @default.
- W2366165051 date "2008-01-01" @default.
- W2366165051 modified "2023-09-23" @default.
- W2366165051 title "Non-Selective SiGe Pattern Epitaxy by MBE" @default.
- W2366165051 hasPublicationYear "2008" @default.
- W2366165051 type Work @default.
- W2366165051 sameAs 2366165051 @default.
- W2366165051 citedByCount "0" @default.
- W2366165051 crossrefType "journal-article" @default.
- W2366165051 hasAuthorship W2366165051A5017947172 @default.
- W2366165051 hasConcept C107365816 @default.
- W2366165051 hasConcept C110738630 @default.
- W2366165051 hasConcept C136525101 @default.
- W2366165051 hasConcept C142724271 @default.
- W2366165051 hasConcept C159122135 @default.
- W2366165051 hasConcept C159985019 @default.
- W2366165051 hasConcept C171250308 @default.
- W2366165051 hasConcept C192562407 @default.
- W2366165051 hasConcept C204787440 @default.
- W2366165051 hasConcept C2779227376 @default.
- W2366165051 hasConcept C2780389399 @default.
- W2366165051 hasConcept C3792809 @default.
- W2366165051 hasConcept C49040817 @default.
- W2366165051 hasConcept C544956773 @default.
- W2366165051 hasConcept C71039073 @default.
- W2366165051 hasConcept C71924100 @default.
- W2366165051 hasConceptScore W2366165051C107365816 @default.
- W2366165051 hasConceptScore W2366165051C110738630 @default.
- W2366165051 hasConceptScore W2366165051C136525101 @default.
- W2366165051 hasConceptScore W2366165051C142724271 @default.
- W2366165051 hasConceptScore W2366165051C159122135 @default.
- W2366165051 hasConceptScore W2366165051C159985019 @default.
- W2366165051 hasConceptScore W2366165051C171250308 @default.
- W2366165051 hasConceptScore W2366165051C192562407 @default.
- W2366165051 hasConceptScore W2366165051C204787440 @default.
- W2366165051 hasConceptScore W2366165051C2779227376 @default.
- W2366165051 hasConceptScore W2366165051C2780389399 @default.
- W2366165051 hasConceptScore W2366165051C3792809 @default.
- W2366165051 hasConceptScore W2366165051C49040817 @default.
- W2366165051 hasConceptScore W2366165051C544956773 @default.
- W2366165051 hasConceptScore W2366165051C71039073 @default.
- W2366165051 hasConceptScore W2366165051C71924100 @default.
- W2366165051 hasLocation W23661650511 @default.
- W2366165051 hasOpenAccess W2366165051 @default.
- W2366165051 hasPrimaryLocation W23661650511 @default.
- W2366165051 hasRelatedWork W1562880577 @default.
- W2366165051 hasRelatedWork W1850644814 @default.
- W2366165051 hasRelatedWork W1898797949 @default.
- W2366165051 hasRelatedWork W1998691455 @default.
- W2366165051 hasRelatedWork W2025307490 @default.
- W2366165051 hasRelatedWork W2054517384 @default.
- W2366165051 hasRelatedWork W2074400866 @default.
- W2366165051 hasRelatedWork W2183174796 @default.
- W2366165051 hasRelatedWork W2287155800 @default.
- W2366165051 hasRelatedWork W2355393015 @default.
- W2366165051 hasRelatedWork W2358995549 @default.
- W2366165051 hasRelatedWork W2362782172 @default.
- W2366165051 hasRelatedWork W2363285622 @default.
- W2366165051 hasRelatedWork W2370823635 @default.
- W2366165051 hasRelatedWork W2390709665 @default.
- W2366165051 hasRelatedWork W2392966633 @default.
- W2366165051 hasRelatedWork W2393655120 @default.
- W2366165051 hasRelatedWork W2534821256 @default.
- W2366165051 hasRelatedWork W3025021164 @default.
- W2366165051 hasRelatedWork W3149134493 @default.
- W2366165051 isParatext "false" @default.
- W2366165051 isRetracted "false" @default.
- W2366165051 magId "2366165051" @default.
- W2366165051 workType "article" @default.