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- W2366565553 abstract "Using Monte Carlo method we can simulate the interaction process of electron beam with specimen and, therefore, to understand the mechanism of signal production in scanning electron microscopy. In this work, we have employed constructive solid geometry modeling to construct the geometrical configuration of complex specimen, and, the ray tracing arithmetic to obtain the correction to the sampling of the flight step length between scattering events. The physical model of electron scattering is based on the use of Mott cross section to describe the elastic interaction of electrons with atoms, and, of a dielectric function approach to electron inelastic interaction with solids; furthermore, cascade secondary electron production process is included. This has enabled us to obtain the simulated secondary electron images and backscattered electron images for a number of complex specimen made of geometrical objects." @default.
- W2366565553 created "2016-06-24" @default.
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- W2366565553 date "2005-01-01" @default.
- W2366565553 modified "2023-09-25" @default.
- W2366565553 title "Combined Monte Carlo method with constructive solid geometry modeling for the simulation of image contrast in scanning electron microscopy" @default.
- W2366565553 hasPublicationYear "2005" @default.
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