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W2366568721 abstract "The research progress in thin films preparation technology in recent years are summarized , the characteristics and relative merits of these preparation methods, such as evaporation deposition, sputtering deposition, laser ablation, CVD, MBE, and SolGel, have been analyzed and stressed. The application prospects for thin films preparation technology are also reviewed." @default.
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W2366568721 date "2003-01-01" @default.
W2366568721 modified "2023-09-25" @default.
W2366568721 title "Novel Thin Films Preparation Technology and Its Application" @default.
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