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- W2366593600 abstract "In situ optical emission spectrometer has been a promising technology for in-line sensor systems for plasma etching process control. The neural network offers great promise in modeling complex fabrication processes such as high density plasma (HDP) etching process. The plasma etching process is monitored in real time with optical emissions spectrometer (OES). Using neural network to model the real time in suit OES data for real time, model based feedback control of plasma etching process is investigated. The SiCl 405 nm from OES spectra range is chosen as the characterized wavelength to call the endpoint detection of the etching process." @default.
- W2366593600 created "2016-06-24" @default.
- W2366593600 creator A5015380529 @default.
- W2366593600 date "2007-01-01" @default.
- W2366593600 modified "2023-09-23" @default.
- W2366593600 title "Modelling of Optical Eemission Spectrometer Data for Plasma Etching Processes" @default.
- W2366593600 hasPublicationYear "2007" @default.
- W2366593600 type Work @default.
- W2366593600 sameAs 2366593600 @default.
- W2366593600 citedByCount "0" @default.
- W2366593600 crossrefType "journal-article" @default.
- W2366593600 hasAuthorship W2366593600A5015380529 @default.
- W2366593600 hasConcept C100460472 @default.
- W2366593600 hasConcept C107187091 @default.
- W2366593600 hasConcept C111919701 @default.
- W2366593600 hasConcept C120665830 @default.
- W2366593600 hasConcept C121332964 @default.
- W2366593600 hasConcept C130472188 @default.
- W2366593600 hasConcept C136525101 @default.
- W2366593600 hasConcept C142724271 @default.
- W2366593600 hasConcept C155386361 @default.
- W2366593600 hasConcept C171250308 @default.
- W2366593600 hasConcept C192562407 @default.
- W2366593600 hasConcept C204787440 @default.
- W2366593600 hasConcept C2779227376 @default.
- W2366593600 hasConcept C33390570 @default.
- W2366593600 hasConcept C41008148 @default.
- W2366593600 hasConcept C49040817 @default.
- W2366593600 hasConcept C62520636 @default.
- W2366593600 hasConcept C71924100 @default.
- W2366593600 hasConcept C82706917 @default.
- W2366593600 hasConcept C98045186 @default.
- W2366593600 hasConceptScore W2366593600C100460472 @default.
- W2366593600 hasConceptScore W2366593600C107187091 @default.
- W2366593600 hasConceptScore W2366593600C111919701 @default.
- W2366593600 hasConceptScore W2366593600C120665830 @default.
- W2366593600 hasConceptScore W2366593600C121332964 @default.
- W2366593600 hasConceptScore W2366593600C130472188 @default.
- W2366593600 hasConceptScore W2366593600C136525101 @default.
- W2366593600 hasConceptScore W2366593600C142724271 @default.
- W2366593600 hasConceptScore W2366593600C155386361 @default.
- W2366593600 hasConceptScore W2366593600C171250308 @default.
- W2366593600 hasConceptScore W2366593600C192562407 @default.
- W2366593600 hasConceptScore W2366593600C204787440 @default.
- W2366593600 hasConceptScore W2366593600C2779227376 @default.
- W2366593600 hasConceptScore W2366593600C33390570 @default.
- W2366593600 hasConceptScore W2366593600C41008148 @default.
- W2366593600 hasConceptScore W2366593600C49040817 @default.
- W2366593600 hasConceptScore W2366593600C62520636 @default.
- W2366593600 hasConceptScore W2366593600C71924100 @default.
- W2366593600 hasConceptScore W2366593600C82706917 @default.
- W2366593600 hasConceptScore W2366593600C98045186 @default.
- W2366593600 hasLocation W23665936001 @default.
- W2366593600 hasOpenAccess W2366593600 @default.
- W2366593600 hasPrimaryLocation W23665936001 @default.
- W2366593600 hasRelatedWork W1499608821 @default.
- W2366593600 hasRelatedWork W1592573831 @default.
- W2366593600 hasRelatedWork W1972765892 @default.
- W2366593600 hasRelatedWork W1981341700 @default.
- W2366593600 hasRelatedWork W1981805899 @default.
- W2366593600 hasRelatedWork W1992100935 @default.
- W2366593600 hasRelatedWork W2003779586 @default.
- W2366593600 hasRelatedWork W2022549163 @default.
- W2366593600 hasRelatedWork W2028929744 @default.
- W2366593600 hasRelatedWork W2049796076 @default.
- W2366593600 hasRelatedWork W2137214309 @default.
- W2366593600 hasRelatedWork W2163884038 @default.
- W2366593600 hasRelatedWork W2790648453 @default.
- W2366593600 hasRelatedWork W2990050810 @default.
- W2366593600 hasRelatedWork W3023593184 @default.
- W2366593600 hasRelatedWork W3042331420 @default.
- W2366593600 hasRelatedWork W1569057331 @default.
- W2366593600 hasRelatedWork W1593237259 @default.
- W2366593600 hasRelatedWork W2842476558 @default.
- W2366593600 hasRelatedWork W3114508197 @default.
- W2366593600 isParatext "false" @default.
- W2366593600 isRetracted "false" @default.
- W2366593600 magId "2366593600" @default.
- W2366593600 workType "article" @default.