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- W2367658342 abstract "Presented a novel uncooled infrared detector structure and its working theory.The novel uncooled infrared detector was fabricated by the technology of MEMS based on silicon technology.During presenting the device,the problems and their solutions during making process are presented.The key techniques including anodic bonding,double-face lithography and etching were also introduced in detail." @default.
- W2367658342 created "2016-06-24" @default.
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- W2367658342 date "2004-01-01" @default.
- W2367658342 modified "2023-09-30" @default.
- W2367658342 title "Research of Technology for Novel Uncooled Infrared Detector" @default.
- W2367658342 hasPublicationYear "2004" @default.
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