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- W2367748908 abstract "The evolution of micro electro mechanical system(MEMS) is reviewed in the paper The state of the art of technologies for MEMS is described Some promising MEMS products are examined, and problems associated with the technology are also discussed." @default.
- W2367748908 created "2016-06-24" @default.
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- W2367748908 date "2001-01-01" @default.
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- W2367748908 title "The State-of-the-Art of Micro Electro Mechanical Systems" @default.
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