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- W2367799193 abstract "In this paper, the behaviors of WSi2 formed from cosputtering W-Si film after rapid thermal annealing in vacuum for 15 sec. are investigated by Raman scattering, SEM, XRD, AES and resistivity measurements. There are two characteristic Raman peaks of WSi2 at 331 and 450cm-1. Crystallization of WSi2 increases with the increase in temperature of rapid thermal annealing. It is found that a W5Si3 phase exists in WSi2, but its behavior is still WSi2 character." @default.
- W2367799193 created "2016-06-24" @default.
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- W2367799193 date "1991-01-01" @default.
- W2367799193 modified "2023-09-26" @default.
- W2367799193 title "NEW MATERIAL FOR VLSI-FORMATION OF WSia BY RAPID THERMAL ANNEALING" @default.
- W2367799193 hasPublicationYear "1991" @default.
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