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- W2368083149 abstract "A 500 μm×500 μm micro-mirror structure actuated by PZT piezoelectric cantilever beam was designed.The micro-mirror consists of four cantilever beams and a speculum,and the four cantilever beams supported the speculum.The deflection of cantilever beam free end engendered uprightness displacement of micro-mirror.A new fabrication process of the micro-mirror compatible with COMS was presented.The smooth degree of reflection mirror,mechanical strength,linearity,response speed and power consume of micro-mirror were simulated by using finite element method software ANSYS7.0.The simulating results were compared with theory computing results,which shows that the micro-mirror achieves the design goals of celerity,high precision and low power consumption." @default.
- W2368083149 created "2016-06-24" @default.
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- W2368083149 date "2007-01-01" @default.
- W2368083149 modified "2023-09-23" @default.
- W2368083149 title "A Novel Integrated Micro-mirror Based on Piezoelectric Thin Film Converse Piezoelectric Effects" @default.
- W2368083149 hasPublicationYear "2007" @default.
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