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- W2368323908 abstract "The development of lithography machines decides the development of semiconductor manufacturing technology.The stepping scanning lithography machine is widely used in the world and its vibration state plays an important role for the performance of the lithography when it works.To provide theoretical guide for the design of stepping and scanning lithography,a simulated testing motion equipment of the Stepping Scanning Lithography was designed,which it can completely realize the motion characteristics of the industrial lithography.On the bases,the vibration of some key parts was tested and Fourier transform and joint time-frequency analysis technology are applied to analyze the tested data.The results indicate that the joint time-frequency analysis technology is suitable for testing the intrinsic properties and vibration characteristic of the lithography and they can provide definite instruction for design of the vibration isolation device of the stepping scanning lithography." @default.
- W2368323908 created "2016-06-24" @default.
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- W2368323908 date "2007-01-01" @default.
- W2368323908 modified "2023-09-23" @default.
- W2368323908 title "Time and Frequency Analysis of Vibration Signals for Testing Motion Equipment of Lithography" @default.
- W2368323908 hasPublicationYear "2007" @default.
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