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- W2368350480 abstract "This paper presents the fabrication of a silicon based ZnO piezoelectric micro- microphone with novel circular vibrating film.Micromachined techniques to fabricate the device are described in detail.The circular vibrating film structure of this microphone is a modification of the rectangular one,and the performances of the device are improved. The sensitivity is-70dB(ref.1V/Pa)and the rate of finished product is 80%." @default.
- W2368350480 created "2016-06-24" @default.
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- W2368350480 date "2006-01-01" @default.
- W2368350480 modified "2023-09-25" @default.
- W2368350480 title "Silicon based ZnO piezoelectric micro-microphone with circular vibrating film" @default.
- W2368350480 hasPublicationYear "2006" @default.
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